Sputtering of metals by heavy ions in the inelastic energy loss range

Abstract Existing experimental data on the sputtering of coarse-grained metals by swift heavy ions is reviewed. Inelastic energy losses of ions have been noted to influence the sputtering yield of metals, but this effect is negligible. Experiments have shown that the sputtering yield of coarse-grained metals by swift heavy ions increases by a factor 3 at high irradiation fluence, but at the expense of accumulating radiation defects in the crystalline structure of the target. Similar experiments for the design and development of heavy ion accelerators and for the use of swift heavy ions in materials processing for implantation of deep-buried layers are also important.