Annealing and wool-making method for monocrystalline silicon wafer

2014 
The invention discloses an annealing and wool-making method for a monocrystalline silicon wafer. The method includes: rinsing a cleaned monocrystalline silicon wafer in a mixed solution of an aqueous hydrofluoric acid solution and an aqueous ethanol solution, adding the monocrystalline silicon wafer moistened with a wool-making liquid into an annealing furnace and annealing, adding the silicon wafer into the wool-making liquid after annealing is finished, and performing wool making. The method is convenient in operation, stable in process and easy to control. The surface pyramids of the silicon wafer after wool making are good in uniformity. The reflectivity of the wool surface is low.
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