Recent advances in Cr-based interference coatings for EUV and soft x-ray optics

Franck Delmotte,Catherine Burcklen,Evgueni Meltchakov,R. Soufli,Jennifer Rebellato,A. Jérome,S. de Rossi

Recent advances in Cr-based interference coatings for EUV and soft x-ray optics

2019

Franck Delmotte
Catherine Burcklen
Evgueni Meltchakov
R. Soufli
Jennifer Rebellato
A. Jérome
S. de Rossi

We present recent advances in the development of Chromium-based interference coatings in the EUV/soft x-ray range. We achieved breakthroughs in coating efficiency by using advanced concepts including 3-material multilayers and interface engineering.

Keywords:

Photon counting
X-ray optics
Thin film
Optics
Coating
Materials science
Chromium
Synchrotron radiation
Extreme ultraviolet lithography
X-ray spectroscopy
Interference (wave propagation)

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