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Deposition of single and layered amorphous fluorocarbon films by C$_8$F$_{18}$ PECVD
Deposition of single and layered amorphous fluorocarbon films by C$_8$F$_{18}$ PECVD
2008
Tatsuya Yamauchi
Kouichiro Mizuno
Hirotake Sugawara
Keywords:
Amorphous solid
Plasma-enhanced chemical vapor deposition
Materials science
Fluorocarbon
Inorganic chemistry
Deposition (law)
Chemical engineering
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