Film forming apparatus and film formation method of a thin film

The present invention, inner surfaces of containers such as PET bottles, either the outer surface, or both the DLC (Diamond Like Carbon) film, SiOx film, SiOC film, SiOCN film, SiNx film, a thin film having high gas barrier properties of the AlOx film, it relates deposition apparatus for forming a. Film forming apparatus, a vacuum chamber for forming a film on the surface of the container (4) in a vacuum state using a heating element (21), and evacuation means for evacuating the vacuum chamber, evacuating the start of the vacuum chamber later, and a relative moving means for relatively moving the container (4) a heating element (21) in a vacuum chamber.