Method for producing photovoltaic devices

The purpose of the present invention is to provide a method for producing photovoltaic devices having high conversion efficiency, which minimize the occurrence of surface plasmon absorption in a rear electrode layer. A method for producing a photovoltaic device (100), in which a first transparent electrode layer (2), a photovoltaic layer (3), a second transparent electrode layer (5), and a rear electrode layer (4) comprising a metal film are sequentially laminated on a substrate (1), said method forming the second transparent electrode layer (5) by means of sputtering in a film forming chamber in which the vapor partial pressure is maintained at not more than 0.6%.