Ion‐beam sputtered diamond‐like carbon with densities of 2.9 g/cc

Thin films of carbon have been deposited at temperatures ranging from 77 to 1073 K. It has been found that diamond‐like properties of the films change with the deposition temperature and the thermal conductivity of the substrate. Densities as high as 2.9 g/cc with an sp3 bond content >40% have been observed. Substrates that have been investigated include graphite, NaCl, Si, Al2O3, fused quartz, and diamond. Density measurements have been made using Rutherford backscattering spectrometry and electron‐energy‐loss spectroscopy while hydrogen profiling was conducted using forward recoil spectrometry.