Dynamic behavior of a new two-axis accelerometer

The dynamic behavior of a piezoresistive two-axis accelerometer for the range of /spl plusmn/5 g and 300 Hz is presented. Damping of the sensor is provided by a squeeze film between the seismic mass and a glass plate. Critical damping is achieved by variation of the gap width at atmospheric pressure. The measured resonance step-up at a frequency of 300 Hz is 1.06 for x-accelerations and 0.992 for z-accelerations. The linearity errors are below 0.6% FSO.