CdTe solar cell manufacturing method capable of reducing defect density

The invention discloses a CdTe solar cell manufacturing method capable of reducing defect density. The method comprises the following steps: (A) a substrate is provided; (B) a transparent conductive oxide thin film is deposited on the substrate; (C) a window layer CdS thin film is deposited; (D) an absorption layer CdTe thin film is deposited on the CdS thin film; (E) a CdCl2 solution is sprayed on the surface of the CdTe thin film, and then thermal treatment is carried out; (F) a solution containing nitric acid is used for etching the CdTe thin film after thermal treatment; and (G) PECVD plasma treatment is carried out on the etched CdTe thin film to passivate defects. According to the method of the invention, during the CdTe solar cell manufacturing process, plasma treatment is introduced to passivate the defects, the defect density of the CdTe thin film is effectively reduced, the material performance is improved, the photoelectric conversion efficiency of the CdTe thin film solar cell is further improved, and the cell performance is improved.