High resistivity nanocrystalline FeRhN films

Sputter deposited FeRhN films with unique microstructural characteristics are presented. They consist of fine α-Fe and γ-Fe4N grains with slightly expanded lattice parameters, which result in soft magnetic properties of the film. The significant amount of face-centered-cubic Fe4N phase gives rise to higher resistivity and therefore improved high frequency permeability than conventional FeRhN films.