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Suppression of High-Energy Backscattered Species in Magnetron Sputter Plasma with Cylindrical Cathode
Suppression of High-Energy Backscattered Species in Magnetron Sputter Plasma with Cylindrical Cathode
2007
Hirotaka Toyoda
Yusuke Takagi
Hideo Sugai
Keywords:
Sputter deposition
Sputtering
Cylinder
Cavity magnetron
Plasma
Kinetic energy
Cathode
Materials science
Atomic physics
high energy
Correction
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