Calculation of ionization depth distributions and backscattering coefficients applying a new Monte Carlo simulation approach

Most simulation methods in the literature for the calculation of ionization depth distributions Φ(ρz) in electron probe microanalysis neglect energy straggling. In this work, a new Monte Carlo simulation method was applied to the calculation Φ(ρz) curves. This method is based on the recently developed partial intensity formalism and accounts for energy straggling through the use of an effective equation for the stochastic process governing multiple energy losses. The obtained simulation results are compared with both experimental results and results of other simulation approaches, and confirm the applicability of this new method for the calculation of Φ(ρz) distributions. This comparison shows that energy straggling does not play a significant role in the formation of the Φ(ρz) curve since the slowing down process is dominated by the momentum relaxation process. © 1998 John Wiley & Sons, Ltd.