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OS1409-285 Effect of Plasma Nitriding on the Strength of Multi-Functional Fine Protrusions Formed by Sputter-Etching
OS1409-285 Effect of Plasma Nitriding on the Strength of Multi-Functional Fine Protrusions Formed by Sputter-Etching
2015
Keijiro Nakasa
Akihiro Yamamoto
Rongguang Wang
Tsunetaka Sumomogi
Keywords:
Plasma
Etching
Nitriding
Sputtering
Materials science
Metallurgy
Correction
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