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Suraface morphology of Si-doped GaN sputtered layer on N-polar GaN substrate
Suraface morphology of Si-doped GaN sputtered layer on N-polar GaN substrate
2021
Shinji Yamada
Masanori Shirai
Hiroki Kobayashi
Ryuichiro Kamimura
Tetsu Kachi
Jun Suda
Keywords:
Polar
Materials science
Substrate (chemistry)
si doped
layer
Chemical engineering
Morphology (linguistics)
Sputtering
Correction
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