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Photothermoacoustic effect in ion-beam implanted Si-based structures
Photothermoacoustic effect in ion-beam implanted Si-based structures
2004
R. M. Burbelo
A.G. Kuzmych
I. M. Sulyma
Keywords:
semiconductor materials
Materials science
Energy transfer
Ion implantation
Optoelectronics
Photoacoustic spectroscopy
Photoacoustic effect
Ion beam
Heat transfer
Spectroscopy
Correction
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