Study of Energy Balance in Low-Inductive Capillary Discharges in EUV Sources

Summary form only given. Calculated results of studying the efficiency of energy input in discharges of EUV radiation sources by Joule heating and work of a magnetic piston in close placed geometry of electrodes are reported. The RMHD program with account of nonequilibrium ionization, self-radiation of plasma and pulsed energy supplying was used. The energy supply system was taken into account concordantly by an equivalent scheme in which a generator of high-voltage pulses and a long transmitting line were changes on the generator of double voltage and the resistor, equal to wave resistance of a line. Calculations were carried out in reference to available full-scale model source of EUV radiation with using argon as working gas. On this source was obtained experimentally the generation on neon-like ions of argon in the region of near 46.9 nm in the form of a narrow peak on background of a long pulse of spontaneous radiation. The purpose of numerical calculations - to find the ways for rising the efficiency of energy input to discharges for obtaining ionization nonequilibrium plasma and to make the recommendations on developing the experimental source. The second part of this report is related with designing a more high-power and short-wave source of recombination type on the example of hydrogen-like nitrogen with a wave length of radiation of 13.4 nm. Results of studying the energy balance of discharges and methods of raise in nonequilibrium average ion charges are analyzed at realization of recombination pumping scheme with using of cumulative shock waves and radiative cooling of plasma.