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Collimated Sputtering of Titanium and Titanium Nitride Films.
Collimated Sputtering of Titanium and Titanium Nitride Films.
1995
James Gardner Ryan
Stephen Bruce Brodsky
Tomio Katata
Makoto Honda
Naohiro Shoda
Hideaki Aochi
Keywords:
Sputtering
Composite material
Materials science
Collimated light
Titanium
Titanium nitride
Correction
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