Microfabricated THz sheet beam vacuum electron devices

The current status of THz sheet beam coherent source development is presented, including theoretical, numerical, and experimental investigation of the operational characteristics/performance, device component design, and emission/ life-time test results of synthesized nanocomposite cathodes. Advanced MEMS techniques using UV lithographic molding and ultra-precision CNC machining to realize the devices in the submillimeter wave regime are also discussed.