Digital microholointerferometry for microstructure studies

Digital micro-holo-interferometry is proposed in this paper for microstructure measurements. It is developed based on the in-line digital holography incorporated with long distance microscope. The system structure is theoretically explained with wavefront diffraction analysis. The compatibility of the long distance microscope with the specific requirements in micromeasurement is discussed. And the properties of the in-line configuration in improving system performance are studied. Theoretical analysis of the system is demonstrated by the experiments on a silicon microbeam for deformation determination.