Cavity-hollow cathode-sputtering source for titanium films

A cavity-hollow cathode was investigated as low-cost sputtering source for titanium. An argon discharge is produced inside a hollow cathode consisting of two specifically formed disks of titanium. An additional cavity further enhances the pendulum effect of the electrons. Measurements with small Langmuir probes yielded evidence for the formation of a space charge double layer above the cathode. The sputtered atoms form negatively charged clusters. After further acceleration by the double layer the clusters impinge on the substrates. Titanium thin films were produced on highly oriented pyrolytic graphite. The films were investigated by a scanning tunnel microscope and X-ray photoelectron spectroscopy.