Soft x-ray transmission measurements on thin films used for XMM CCD-filters

We have been developing optical filters for ESA’s X-ray astronomy project XMM (X-ray Multi Mirror Mission). Specific CCDs will be used as detectors in the focal plane on board the observatory (1). Since these detectors are sensitive from the X-ray to the near infrared spectral range, X-ray observations require optical filters, which combine a high transparency for photon energies in the soft X-ray region and a high opacity for ultraviolet and visible radiation as well. With respect to the mission goal in orbit three types of flight model filters are designed having different spectral transmittance functions. We report on one of these types, a so-called “thick” filter, which has been realized within the EQM (Electrical Qualification Model)-phase of the project. The filter features a cut-off in the extreme ultraviolet spectral range and suppresses radiation below ∼10 eV photon energy by more than 8 orders of magnitude. It has an effective aperture of 73 mm without any support structure. A 0.35 μm thick poly...