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Epitaxial growth of AlN thin films at low temperature by magnetron sputtering technique
Epitaxial growth of AlN thin films at low temperature by magnetron sputtering technique
2013
J. Camus
Q. Simon
K. Ait-Aissa
S Bensalem
L. Le Brizoual
G. Tessier
Yves Scudeller
M. A. Djouadi
Y. Cordier
E. Frayssinet
M. Chmielowska
M. Nemoz
P. Vennéguès
S. Chenot
N. Defrance
M. Lesecq
P. Altuntas
Adrien Cutivet
A. Agboton
J.C. De Jaeger
Keywords:
Thin film
Sputter deposition
Epitaxy
Analytical chemistry
Materials science
Optoelectronics
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