Strain gauge factor and TCR of sputter deposited Pt thin films up to 850°C

A novel, custom built measurement setup for the temperature dependent characterization of thin films under ambient and controlled gas atmosphere in respect to their electro-mechanical performance is presented. The strain gauge factor of platinum thin films (thickness: 1 mum) is determined at temperatures ranging from room temperature up to 850degC on aluminum oxide samples designed to provide a constant strain value along their axis.