High-resolution and wide-bandwidth light intensity fiber optic displacement sensor for MEMS metrology

We report on the design, properties, and applications of a high-resolution and wide-bandwidth light intensity fiber optic displacement sensor for microelectromechanical system (MEMS) metrology. There are two types of structures that the system is dedicated to: vibrating with both high and low frequencies. In order to ensure high-frequency and high-resolution measurements, frequency down mixing and selective signal processing were applied. The obtained effective measuring bandwidth ranges from single hertz to 1 megahertz. The achieved resolution presented here is 116 pm/Hz1/2 and 138 pm/Hz1/2 for low-frequency and high-frequency operation modes, respectively, whereas the measurement of static displacement is 100 μm.