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Planar Process for 16 Mb Bubble Memory Devices Using Thermal Reflow‐Type Polyimide
Planar Process for 16 Mb Bubble Memory Devices Using Thermal Reflow‐Type Polyimide
1989
Hiroshi Umezaki
Naoki Koyama
Ryo Suzuki
Haruhiko Matsuyama
F. Shooji
Keywords:
Thermal
Planar process
Bubble memory
Polyimide
Chemistry
Analytical chemistry
Electrical engineering
Optoelectronics
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