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Galvanic Corrosion of Stacked Metal Gate Electrodes during Cleaning in HF Solutions
Galvanic Corrosion of Stacked Metal Gate Electrodes during Cleaning in HF Solutions
2007
Sylvain Garaud
Rita Vos
Denis Shamiryan
Vasile Paraschiv
Paul W. Mertens
Jan Fransaer
Stefan De Gendt
Keywords:
Metal gate
Metallurgy
Composite material
Hydrofluoric acid
Galvanic corrosion
Electrode
Materials science
Wet cleaning
metal gate electrodes
Correction
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