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Fabrication of GaN Thin Films by RF Magnetron Sputtering and The Pressure Dependence of Electrical Resistance
Fabrication of GaN Thin Films by RF Magnetron Sputtering and The Pressure Dependence of Electrical Resistance
2020
Yuki Saito
Takuya Miyamoto
Yuki Sato
Tadashi Ohachi
Shinzo Yoshikado
Kikuro Takemoto
Hiroyuki Uno
Naoto Kimura
Masanori Takasaki
Keywords:
Optoelectronics
Sputter deposition
Materials science
Fabrication
Electrical resistance and conductance
Thin film
Sputtering
pressure dependence
Correction
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