Fabrication and characterization of metal to insulator phase transition thin films

VO2 thin films were successfully fabricated on glass substrates by magnetron sputtering at room temperature and thermal oxidation in the air. The structures, compositions, and optical properties of the films were characterized. Raman scattering and X-ray photoelectron spectroscopy demonstrated that the films were mostly composed of VO2. X-ray diffraction and scanning electron microscopy patterns showed the relation between crystal structures and thermal oxidation. The optical measurement results showed the infrared transmittance variation of the film was above 50 % at 2500 nm, and the width of the thermal-hysteresis loop of the film was about 8 oC. The VO2 thin films presented a good charac…