Reliability acceleration model of stacked ZrO 2 -Al 2 O 3 -ZrO 2 MIM capacitor with cylinder type

An exact lifetime extrapolation models of ZrO 2 -Al2O3-ZrO 2 (ZAZ) stack capacitor with metal-insulator-metal (MIM) structure was studied in this paper. From the extensive long-term test result (~ 7.5 months) it was found that the power-law model is suitable as a exact lifetime extrapolation model for ZAZ dielectric reliability.