Microscopic Parameters to Describe Homogeneity of Alkaline Texture on Si-wafers

Abstract In this paper, alkaline textured surfaces are described by means of statistical methods to evaluate what can be behind the term homogeneity found in literature. The evaluation of pyramid homogeneity is described in respect of the pyramid tip positions in the plane by testing against complete spatial randomness. The basic statistical methods used are described and a comparison with microscopic geometrical features of the pyramids is discussed. The statistical analysis yields appropriate classifications allowing for quantitative judgment of whether a surface has a regular (“homogeneous”) distribution of pyramids or not.