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Studies of internal stresses and surface roughness of sputtered Be and BeB films
Studies of internal stresses and surface roughness of sputtered Be and BeB films
1987
E.J. Hsieh
C.H. Gillespie
E. L. Pierce
C. W. Hatcher
Keywords:
Surface roughness
Ionizing radiation
Alkaline earth metal
Thin film
Electromagnetic radiation
Atomic physics
Plasma
Sputtering
Beryllium
Materials science
Composite material
Deposition (law)
surface coating
Correction
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