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Flash Lamp Annealing temperature dependency on interface trap density of high-k gate stack
Flash Lamp Annealing temperature dependency on interface trap density of high-k gate stack
2019
Kodai Shuto
Taiho Yoshinaka
Kodai Fujiwara
Hikaru Kawarazaki
Takayuki Aoyama
Shinichi Kato
Yasuo Nara
Keywords:
trap density
High-κ dielectric
Annealing (metallurgy)
Materials science
Optoelectronics
gate stack
Flash-lamp
Correction
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