Annealing Effects on Titania Doped Zinc Oxide (ZnO:Ti) and Gallium Doped Zinc Oxide (ZnO:Ga) Thin Films Prepared by DC Magnetron Sputtering

Transparent conductive oxides (TCO) are used as transparent electrodes in thin fi lm solar cells. Especially for CdTe solar cells, the successive production processes require high temperature stability for the TCO material. ZnO:Ti and ZnO:Ga thin layers can resist temperatures up to 600°C while having a smooth surface and good electrical and optical properties. Layers of zinc oxide doped with titania or gallium oxide were deposited on glass substrates using magnetron sputtering from a single planar cathode (length of 750 mm). The thin fi lm properties were investigated and compared to aluminum doped zinc oxide (ZnO:Al) thin fi lms.