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Morphological study of RF magnetron sputtered silicon thin films on AISI 304 stainless steel
Morphological study of RF magnetron sputtered silicon thin films on AISI 304 stainless steel
2012
Zulhelmi Alif Abdul Halim
Ahmad Akram
Muhamad Azizi Mat Yajid
Keywords:
Sputtering
Thin film
Cavity magnetron
Metallurgy
Silicon
Materials science
diamond deposition
silicon thin film
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