Computer Simulation for Analysis of Lattice Polarity of Wurtzite GaN{0001} Film by Coaxial Impact Collision Ion Scattering Spectroscopy

Signal intensities of coaxial impact collision ion scattering spectra have been computed for c-axis-oriented GaN films at various incident angles in order to analyse the lattice polarity based on the three-dimensional two-atom triple-scattering model. It was found that Ga and N signal intensities show specific incident angle dependences on (0001) and (000) surfaces. The physical image of each characteristic feature in the spectra was also clarified.