VCO Resonators Using ZnO Sputtered Film

Unique, adjustment-free VCO oscillators for FM stereo demodulators have been developed by using ZnO piezoelectric thin films. The reactive sputtering method is employed for the deposition of ZnO thin film transducers onto tuning-bar resonators which are photolithographically fabricated from an ELINVAR alloy metal plate. These oscillators encapsulated in SIP type resin packages (2.5T×6W×8L mm) operate at 76 kHz, and are found to be practical and useful because of their superior features. Excellent performance characteristics are obtained from the FM multiplexer using this oscillator.