Characterization of ion-beam- and magnetron- sputtered YBa2Cu3O7−x high Tc superconducting films by secondary neutral mass spectrometry depth profiling☆

Polycrystalline superconducting YBa2Cu3O7−x films were prepared on various substrates by ion beam and magnetron sputtering of appropriate ceramic compound targets. In the case of ion beam sputtering the crystallite size was in general larger than for magnetron-sputtered films. The influence of the post-deposition annealing procedure on the film composition has been studied with secondary neutral mass spectrometry (SNMS). Depth profiling with SNMS reveals interdiffusion of substrate, barrier layer and film species.