Micro Ultrasonic Machining of Ceramic MEMS With Micro Metallic Dies

Micro ultrasonic Machining (MUSM) is useful for producing micro parts in brittle materials, especially ceramics. By use of suitable micro metallic dies, the efficiency of fabrication can be significantly enhanced. In this study, the LIGA process was used to generate micro nickel dies, which also served as microelectrodes in Die-sinking Electrical Discharge Machining (EDM) to produce micro tungsten dies for MUSM. With these micro metallic dies, micro ceramic components were fabricated.Copyright © 2003 by ASME