Defects in hard coatings studied by positron annihilation spectroscopy and x‐ray diffraction
1992
TiNx (0.5positron annihilation spectroscopy and x‐ray diffraction techniques. The deposition parameters investigated include nitrogen partial pressure, deposition power, substrate bias, film thickness, and substrate condition. The synergistic effects of using multiple techniques to characterize the same or similar samples is emphasized.
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