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Studying local aluminum back surface fields (AL-BSF) contacts through scanning spreading resistance microscopy (SSRM)
Studying local aluminum back surface fields (AL-BSF) contacts through scanning spreading resistance microscopy (SSRM)
2011
Angel Uruena De Castro
Joachim John
Pierre Eyben
Danielle Vanhaeren
Thilo Werner
Thomas Hantschel
Wilfried Vandervorst
J. Poortmans
Robert Mertens
Keywords:
Microscopy
Spreading resistance profiling
Optics
Materials science
Aluminium
Nanotechnology
Correction
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