Development of metal oxide gas sensors for very low concentration (ppb) of BTEX vapors

The control and analysis of air quality have become a major preoccupation of the last twenty years. In 2008, the European Union has introduced a Directive (2008/50/EC) to impose measurement obligations and thresholds to not exceed for some pollutants, including BTEX gases, in view of their adverse effects on the health. In this paper, we show the ability to detect very low concentrations of BTEX using a gas microsensor based on metal oxide thin-film. A test bench able to generate very low vapors concentrations has been achieved and fully automated. Thin metal oxides layers have been realized by reactive magnetron sputtering. The sensitive layers are functionalized with gold nanoparticles by thermal evaporation technique. Our sensors have been tested on a wide range of concentrations of BTEX (5 - 500 ppb) and have been able to detect concentrations of a few ppb for operating temperatures below 593 K. These results are very promising for detection of very low BTEX concentration for indoor as well as outdoor application. We showed that the addition of gold nanoparticles on the sensitive layers decreases the sensors operating temperature and increases the response to BTEX gas. The best results are obtained with a sensitive layer based on ZnO.