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Roughness Power Spectral Density as a Function of Aerial Image and Basic Process / Resist Parameters
Roughness Power Spectral Density as a Function of Aerial Image and Basic Process / Resist Parameters
2020
Charlotte Cutler
Choong-Bong Lee
James W. Thackeray
Peter Trefonas
John Nelson
Jason DeSisto
Mingqi Li
Rochelle Rena
Chris A. Mack
Keywords:
Materials science
line edge roughness
Optics
Photochemistry
Aerial image
Surface finish
Spectral density
Resist
Correction
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