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Polycrystalline ZnO Films Deposited on Glass by RF Reactive Sputtering
Polycrystalline ZnO Films Deposited on Glass by RF Reactive Sputtering
2004
Gong Heng-Xiang
He Yun-yao
Wang Qi-feng
Jin Guo-juan
Fang Zebo
Wang Yin-Yue
Keywords:
Sputtering
Crystallite
Composite material
Ceramic materials
Materials science
Optoelectronics
optical transmittance
Correction
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