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Fabrication of c-AIN/a-Sapphire Templates by Sputtering and High-Temperature Annealing
Fabrication of c-AIN/a-Sapphire Templates by Sputtering and High-Temperature Annealing
2019
Hayashi Yusuke
Fujikawa Kaito
Uesugi Kenjiro
Shojiki Kanako
Miyake Hideto
Keywords:
Science, technology and society
Template
Sapphire
Chemical substance
Sputtering
Materials science
Optoelectronics
Annealing (metallurgy)
Fabrication
Correction
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