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Optical lithography on a V-grooved substrate for 3D nanofabrication
Optical lithography on a V-grooved substrate for 3D nanofabrication
2016
Diana Grishina
Cornelis A.M. Harteveld
E. van der Heijden
Jozef Maria Finders
A.J. den Boef
Willem L. Vos
Keywords:
Nanolithography
X-ray lithography
Optics
Photolithography
Physics
Next-generation lithography
Extreme ultraviolet lithography
Optoelectronics
Substrate (chemistry)
Correction
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