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Embedded microclusters in zeolites and cluster beam sputtering: Simulation on parallel computers
Embedded microclusters in zeolites and cluster beam sputtering: Simulation on parallel computers
1994
P. Vashishta
R.K. Kalia
D.L Greenwell
Keywords:
Sputtering
Surface roughness
Crystal
Porosity
Beam (structure)
Molecular dynamics
Silicon dioxide
Amorphous solid
Optoelectronics
Materials science
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