Electrical properties of amorphous lithium electrolyte thin films

Abstract The impedance of xLi 2 O · ySiO 2 · zP 2 O 5 thin films deposited by RF-magnetron sputtering was analyzed using two models in which the frequency dependence of the bulk response was represented by: (1) a Cole-Cole dielectric function and (2) a constant phase angle element. Increases in the conductivity with Li 2 O concentration and with addition of SiO 2 to Li 2 O-P 2 O 5 compositions are attributed to an increase in Li + mobility caused by changes in the film structure. A new amorphous oxynitride electrolyte, Li 3.3 PO 3.9 N 0.17 , prepared by sputtering Li 3 PO 4 in N 2 , has a conductivity at 25°C of 2×10 −6 S/cm and is stable in conta with lithium.