Mass spectrometry on the nanoscale with ion sputtering based techniques: What is feasible☆

The potential of ion sputtering based mass spectrometry applied to materials characterization on the nanometer scale is discussed. Analytical approaches and required instrumental capabilities are outlined, and the current state-of-the-art is summarized. A new generation of analytical instruments specifically optimized for laser post-ionization secondary neutral mass spectrometry has been developed at Argonne National Laboratory (ANL). Experimentally verified (or anticipated after near-future upgrades) analytical capabilities of these instruments, capable of quantitative analysis at the nanometer-scale, are reported and compared to secondary ion mass spectrometry.