Converting SOI to sSOI through Amorphization and Crystallization: Material Analysis and Device Demonstration

Converting SOI to sSOI through Amorphization and Crystallization: Material Analysis and Device Demonstration S. Maitrejean,a,z N. Loubet,b E. Augendre,a P. Morin,b S. Reboh,c N. Bernier,c R. Wacquez,a B. Lherron,b A. Bonnevialle,c,d Q. Liu,b J. M. Hartmann,c,∗ H. He,e A. Halimaoui,d J. Li,e S. Pilorget,b J. Kanyandekwe,b L. Grenouillet,c F. Chafik,b Y. Morand,d C. Le Royer,c O. Faynot,a M. Celik,b B. Doris,e and B. De Salvoa