Soft X-ray scanning photoelectron microscope using Wolter-type focusing mirror

Abstract The soft x-ray scanning photoelectron microscope has been developed and installed at a soft x-ray beamline of the Photon Factory (KEK-PF). The microscope uses a Wolter type-I grazing incidence mirror to form a soft x-ray microbeam. The mirror was fabricated more accurately than previous one by using a new replication method, allowing a 0.47-μm microbeam to be ahcieved. In addition, a high-precision x-y sample stage made it possible to obtain two dimensional photoelectron images. The microscope demonstrated a total-photoyield image of 0.3-μm-linewidth stripe patterns and an energy-selected photoelectron image of 2-μm-linewidth stripe patterns.